12-inch fully automatic wafer ring dicing equipment
AR9000RR
AR9000RR is a fully automatic ring dicing and ring removal equipment specially built for the 12-inch TAIKO process. It adopts a panoramic window design, has sufficient maintenance space and the doors do not interfere with each other, making the operation safe and reliable. The equipment continues to use three-point claw positioning and backlight alignment technology, and has been upgraded to include closed-loop motor control, slope positioning claws and photoelectric zero return sensing. It is equipped with a three-point double locking leveling structure to achieve higher positioning accuracy and repeatability. It does not require repeated zero returns and can effectively avoid mucosal risks. The back-lit alignment method has no graphic interference, clear boundaries and fewer alarms. It is supplemented by light-transmitting holes and light source cleaning and blowing designs, which comprehensively guarantees the process quality and long-term operation stability of ring dicing and ring removal.
Processing size
Spindle configuration
| Classification | Parameter name | Parameter value |
|---|---|---|
| working size | Φ12" | |
| Spindle | Configuration method | single spindle |
| Output power | 1.2/1.8/2.4/3.0 kW at 30,000rpm | |
| Speed range | 3,000 - 60,000 rpm | |
| Blade size | Maximum Φ58mm | |
| Y axis | Cuttable range | 210 mm |
| Single step amount | 0.0001 mm | |
| In place accuracy | < 0.008 mm/210 < 0.002 mm/5 | |
| X axis | Cuttable range | 210 mm |
| Z axis | Movement resolution | 0.00005 mm |
| Repeat accuracy | 0.001 mm | |
| θ axis | Maximum rotation angle | 380° |
| Ring dicing accuracy | ±50 μm | |
| Wafer positioning accuracy | ±50 μm | |
| Single chip efficiency | 8 min/pcs | |
| Multi-chip efficiency | Up to 4 pieces can be processed simultaneously | |
| Working voltage | Three-phase 380V 50Hz | |
| Device information | length, width and height | 2209×1554×2071 mm |
| weight | ≈ 2800 Kg |
BBD blade damage detection
NCS non-contact height measurement
Online knife sharpening
Fully automatic dicing
More features or custom features
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