8-inch automatic precision dicing equipment

AR6000

AR6000 is a single-axis automatic precision dicing machine that is suitable for precision dicing of 8-inch silicon wafers, ceramics, PCB boards and other materials. It is widely used in semiconductor industries such as IC, LED, MEMS, photovoltaics, and medical equipment. This equipment integrates automatic alignment, dicing and knife mark detection functions, with high production efficiency; it adopts imported precision transmission and closed-loop control to ensure stable dicing accuracy; it supports customized adaptation, convenient Wafer/PKG switching, and excellent reliability. It also has the outstanding advantages of small footprint and high cost performance.

Processing size

Φ 8" / 205x205 mm

Spindle configuration

single spindle
Download information
Classification Parameter name Parameter value
Processing size - 8" / 205×205 mm
Spindle Output power 1.2/1.8/2.4/3.0 kW(30,000 rpm)
Speed range 6,000 - 60,000 rpm
Y axis itinerary 58 mm
X-axis resolution 0.0001 mm
Accuracy 0.002 mm
Z axis speed range 0.1 - 500 mm/s
θ axis resolution 0.001 mm
power supply - 220V 50Hz
Device information Width, depth and height 760×1000×1600 mm
weight 650 Kg
BBDBlade damage detection

BBD blade damage detection

NCS

NCS non-contact height measurement

Online knife sharpening

Online knife sharpening

automatic alignment

automatic alignment

More features or custom features
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wafer

silicon wafer

SiC

Silicon carbideSiC

LiTaO3

Lithium tantalate/lithium niobate

gallium arsenide

gallium arsenide

FOPLP

FOPLP glass substrate

LEDencapsulation

LED packaging

integrated circuit

integrated circuit

Ceramic substrate

Ceramic substrate

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