20-inch automatic precision scribing equipment

AR8100

AR8100 is an extra-large fully automatic bi-axis precision dicing machine that supports products up to 20 inches/500x500mm. It is suitable for dicing silicon wafers, ceramics, PCB boards, EMC, quartz, glass and other materials. It is widely used in IC, LED, MEMS, photovoltaic, medical equipment and other industries. It supports up to 500×500mm ultra-large size processing, adopts a dual-axis high-efficiency dicing mode, and is about 80% more efficient than a single machine; equipped with precision imported transmission and closed-loop control, the dicing accuracy is stable; it supports multi-piece dual-knife dicing on the same plate, automatic calibration and knife mark detection. The dicing frame and table can be customized to adapt to complex processes, with comprehensive functions and outstanding efficiency.

Processing size

Φ 20" / 500x500 mm

Spindle configuration

Opposed double spindles
Download information
Classification Parameter name Parameter value
Processing size - 20" / 500×500 mm
Spindle Output power 1.8/2.4/3.0 kW(30,000 rpm)
Speed range 6,000 - 60,000 rpm
Y axis itinerary 110 mm
X-axis resolution 0.0001 mm
Accuracy 0.008 mm
Z axis speed range 0.1 - 600 mm/s
θ axis resolution 0.001 mm
power supply - 380V 50Hz
Device information Width, depth and height 1350×1720×1840 mm
weight 1600 Kg
BBDBlade damage detection

BBD blade damage detection

NCS

NCS non-contact height measurement

Online knife sharpening

Online knife sharpening

automatic alignment

automatic alignment

More features or custom features
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wafer

silicon wafer

SiC

Silicon carbideSiC

LiTaO3

Lithium tantalate/lithium niobate

gallium arsenide

gallium arsenide

FOPLP

FOPLP glass substrate

LEDencapsulation

LED packaging

integrated circuit

integrated circuit

Ceramic substrate

Ceramic substrate

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