12-inch cleaning equipment
AC1200
AC1200 is a 12-inch automatic cleaning equipment, which supports the processing of workpieces up to φ12" or 280×280mm, and the working speed is 100-1800rpm. It continues the series of high dynamic balance and high reliability designs, and can customize special work surfaces; it adopts PLC fully automatic touch operation, supports multiple cleaning modes and intelligent parameter editing, and has complete safety protection; the overall size is 650×670×1400mm, and the weight is approx. 100kg, suitable for efficient cleaning needs of large-size wafers.
Processing size
| Classification | Parameter name | Parameter value |
|---|---|---|
| working size | Maximum processing size | Φ12" or square 280x280mm |
| Spindle | Working speed | 100-1800 rpm |
| compressed air | supply pressure | 0.5-0.8 MPa |
| maximum consumption | 150 L/min ANR | |
| DI water | pressure | 0.25-0.4 MPa |
| maximum consumption | 6.0 L/min ANR | |
| N2 | pressure | 0.25-0.4 MPa |
| maximum consumption | 200 | |
| Exhaust system | Exhaust air volume | 2 m³/min |
| Device information | power supply | Two-phase 220V ±10% |
| Width, depth and height | 650x670x1400 mm | |
| weight | ≈ 100 Kg |
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