12 inch cleaning equipment

AC1200

AC1200 is a 12 inch automatic cleaning equipment that supports processing of workpieces with a maximum diameter of 12 "or 280 × 280mm, with a working speed of 100-1800rpm. It continues the series of high dynamic balance and high reliability designs, and can customize special workbenches; Adopting PLC fully automatic touch operation, supporting multiple cleaning modes and intelligent parameter editing, with complete safety protection; The overall size is 650 × 670 × 1400mm, with a weight of approximately 100kg, suitable for the efficient cleaning needs of large-sized wafers.

machining dimensions

Φ 12" / 280x280 mm
Classification parameter name parameter value
Working dimensions Maximum processing size Φ 12 "or square 280x280mm
spindle operating speed 100-1800 rpm
compressed air Supply pressure 0.5-0.8 MPa
Maximum consumption 150 L/min ANR
DI water stress 0.25-0.4 MPa
Maximum consumption 6.0 L/min ANR
N2 stress 0.25-0.4 MPa
Maximum consumption two hundred
exhaust system Exhaust air volume 2 m³/min
Device Information Power supply Two phase 220V ± 10%
Width, depth, and height 650x670x1400 mm
weight ≈ 100 Kg

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